| Tool | Description |
|
HLDS
| Short Spacing Acquisition Time |
|
HLDS-D
| Short Spacing Acquisition Time |
|
ILDT-A
| Short Spacing Acquisition Time |
|
ILDT-B
| Short Spacing Acquisition Time |
|
LDS
| Short Spacing Acquisition Time |
|
LDS-C
| Short Spacing Acquisition Time |
|
QLDTA
| Short Spacing Acquisition Time |
|
QLDTB
| Short Spacing Acquisition Time |
|
SLDTA
| Short Spacing Acquisition Time |
