| Tool | Description | 
			| NCMT-A | Lower electrode Injected Current Quadrature, Pad A | 
			| NCMT-B | Lower electrode Injected Current Quadrature, Pad A | 
			| OBMT-B | Lower electrode Injected Current Quadrature, Pad A | 
			| OBMT-D | Lower electrode Injected Current Quadrature, Pad A | 
			| OBMT-E | Lower electrode Injected Current Quadrature, Pad A |