Tool | Description |
NCMT-A
| Lower electrode Injected Current InPhase, Pad A |
NCMT-B
| Lower electrode Injected Current InPhase, Pad A |
OBMT-B
| Lower electrode Injected Current InPhase, Pad A |
OBMT-D
| Lower electrode Injected Current InPhase, Pad A |
OBMT-E
| Lower electrode Injected Current InPhase, Pad A |