| Tool | Description |
|
NCMT-A
| Upper electrode Injected Current InPhase, Pad B |
|
NCMT-B
| Upper electrode Injected Current InPhase, Pad B |
|
OBMT-B
| Upper electrode Injected Current InPhase, Pad B |
|
OBMT-D
| Upper electrode Injected Current InPhase, Pad B |
|
OBMT-E
| Upper electrode Injected Current InPhase, Pad B |
