Channel | Description |
CV1POSMS1
| FNMS 1 Chamber 1 Valve Position |
CV2POSMS1
| FNMS 1 Chamber 2 Valve Position |
CV3POSMS1
| FNMS 1 Chamber 3 Valve Position |
CV4POSMS1
| FNMS 1 Chamber 4 Valve Position |
CV5POSMS1
| FNMS 1 Chamber 5 Valve Position |
CV6POSMS1
| FNMS 1 Chamber 6 Valve Position |
LSVPOSMS1
| FNMS 1 Lower Seal Valve Position |
USVPOSMS1
| FNMS 1 Upper Seal Valve Position |