| Tool | Description |
|
PRSTC
| Far Effective Beam Current |
|
PRSTD
| Far Effective Beam Current |
|
RS3T-A
| Far Effective Beam Current |
|
RST-C
| Far Effective Beam Current |
|
RST-D
| Far Effective Beam Current |
|
RSTA
| Far Effective Beam Current |
|
RSTB
| Far Effective Beam Current |
|
RSTC
| Far Effective Beam Current |
|
RSTD
| Far Effective Beam Current |
