| Tool | Description |
|
PRSTC
| Near Effective Beam Current |
|
PRSTD
| Near Effective Beam Current |
|
RS3T-A
| Near Effective Beam Current |
|
RST-C
| Near Effective Beam Current |
|
RST-D
| Near Effective Beam Current |
|
RSTA
| Near Effective Beam Current |
|
RSTB
| Near Effective Beam Current |
|
RSTC
| Near Effective Beam Current |
|
RSTD
| Near Effective Beam Current |
