| Tool | Description |
|
RFT
| SGP Temperature Calibration Zero Value |
|
RFTB
| SGP Temperature Calibration Zero Value |
|
RTBC
| SGP Temperature Calibration Zero Value |
|
RTBO
| SGP Temperature Calibration Zero Value |
|
RTCU
| SGP Temperature Calibration Zero Value |
|
RTOU
| SGP Temperature Calibration Zero Value |
|
SRFT
| SGP Temperature Calibration Zero Value |
|
SRFT_A
| SGP Temperature Calibration Zero Value |
|
SRFT_B
| SGP Temperature Calibration Zero Value |
|
SRFT_C
| SGP Temperature Calibration Zero Value |
|
SRFT_D
| SGP Temperature Calibration Zero Value |
|
SRFT_E
| SGP Temperature Calibration Zero Value |
|
SRFT_F
| SGP Temperature Calibration Zero Value |